Email: grzegorz.klubinski@pwr.edu.pl
Unit: Faculty of Electronics, Photonics and Microsystems (N) » Department of Electronic and Photonic Metrology
ul. Długa 61-65, 53-633 Wrocław
Długa openlab
phone +48 71 320 4970
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| 1 | Article 2002
| Quantitative characterization of surface topography in scanning electron microscopy. Inżynieria Materiałowa. 2002, R. 23, nr 2, s. 69-72. ISSN: 0208-6247 |
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| 2 | Proceeding paper 1998
| Unit for surface profile reconstruction in scanning electron microscope. W: Proceedings of the 21-st Conference of the International Society for Hybrid Microelectronics Poland Chapter, Ustroń, 5-8 October, 1997 / Ed. by Marian Łukaszewicz and Małgorzata Kramkowska. Wrocław [właśc. Cracow] : The International Microelectronics and Packaging Society Poland Chapter, 1998. s. 105-108. ISBN: 83-904462-3-5 |
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| 3 | Proceeding paper 1997
| Zespół odtwarzania profili powierzchni do skaningowego mikroskopu elektronowego. W: Technologia elektronowa. VI Konferencja Naukowa ELTE 97, Krynica, 6.05-9.05.1997. T. 2. Kraków : AGH, 1997. s. 298-302. |
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| 4 | Proceeding paper 1996
| Equipment for investigation of the electronic devices with the voltage contrast technique in SEM. W: Metal/nonmetal microsystems: physics, technology, and applications, Polanica Zdrój, Poland, 11-14 September 1995 / Eds Benedykt W. Licznerski, Andrzej Dziedzic. Bellingham, Wash. : SPIE - The International Society for Optical Engineering, 1996. s. 121-124. ISBN: 0-8194-2166-9 | | Resources:SFX | |
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