Email: michal.krysztof@pwr.edu.pl

Unit: Faculty of Electronics, Photonics and Microsystems (N) » Department of Microsystems

ul. Długa 61-65, 53-633 Wrocław
building M-6, room 36
phone +48 71 320 4974

Office hours

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Research fields

• Silicon and glass microengineering; MEMS and MOEMS; High Vacuum MEMS; electron microscopy.

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Recent papers

2018

• Krysztof M., Grzebyk T.P., Szyszka P., Laszczyk K., Górecka-Drzazga A., Dziuban J., Technology and parameters of thin membrane-anode for MEMS transmission electron microscope, Journal of Vacuum Science and Technology B, Nanotechnology & Microelectronics, 2018, vol. 36, nr 2, art. 02C107, s. 1-6.
• Słówko W., Wiatrowski A., Krysztof M., Detection of secondary and backscattered electrons for 3D imaging with multi-detector method in VP/ESEM, Micron, 2018, vol. 104, s. 45-60.

2015

• Krysztof M., Grzebyk T.P., Górecka-Drzazga A., Dziuban J., Zintegrowany, miniaturowy, transmisyjny mikroskop elektronowy, patent, P 413122 z dn. 14.07.2015. Opubl. 28.04.2017.
• Krysztof M., Grzebyk T.P., Górecka-Drzazga A., Dziuban J., Electron beam forming in MEMS-type electron gun, 28th International Vacuum Nanoelectronics Conference, IVNC 2015: technical digest, July 13-17, 2015, Guangzhou, China, s. 194-195.
• Krysztof M., Dziuban J., Górecka-Drzazga A., Grzebyk T.P., MEMS-type microchips for biological samples investigation in electron microscopy, Microscopy Conference, MC 2015, Göttingen, Germany, September 6-11, 2015, s. 342-344.

Papers in DONA database

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1	Article 2023 Marcin Białas, Tomasz Grzebyk, Michał Krysztof, Signal detection and imaging methods for MEMS electron microscope. Ultramicroscopy. 2023, vol. 244, art. 113653, s. 1-10. ISSN: 0304-3991; 1879-2723 Resources:DOIURLSFX
2	Proceeding paper 2022 Paweł Urbański, Marcin Białas, Michał Krysztof, Tomasz Grzebyk, Mems X-ray source: electron-radiation conversion. W: 2022 21st International Conference on Micro and Nanotechnology for Power Generation and Energy Conversion Applications (PowerMEMS), 12-15 December 2022, Utah, Salt Lake City, USA. [B.m.] : IEEE, 2022. s. 42-45. ISBN: 978-1-6654-9307-9; 978-1-6654-9306-2 Resources:DOIURL
3	Proceeding paper 2022 Michał Krysztof, Paweł Urbański, Tomasz Grzebyk, Matthias Hausladen, Rupert Schreiner, MEMS X-ray source: electron emitter development. W: 2022 21st International Conference on Micro and Nanotechnology for Power Generation and Energy Conversion Applications (PowerMEMS), 12-15 December 2022, Utah, Salt Lake City, USA. [B.m.] : IEEE, 2022. s. 248-251. ISBN: 978-1-6654-9307-9; 978-1-6654-9306-2 Resources:DOI
4	Article 2022 Michał Krysztof, Marcin Białas, Tomasz Grzebyk, Atmospheric pressure electron detection method for MEMS electron microscope. IEEE Electron Device Letters. 2022, vol. 43, nr 5, s. 813 - 815. ISSN: 0741-3106; 1558-0563 Resources:DOIURLSFX
5	Article 2021 Michał Krysztof, Design of an Einzel lens with square cross-section. Electronics. 2021, vol. 10, nr 19, art. 2338. 1-15. ISSN: 2079-9292 Resources:DOIURL
6	Article 2021 Michał Krysztof, Field-emission electron gun for a MEMS electron microscope. Microsystems & Nanoengineering. 2021, vol. 7, nr 1, art. 43, s. 1-9. ISSN: 2055-7434 Resources:DOISFX
7	Article 2021 Michał Krysztof, Marcin Białas, Piotr Szyszka, Tomasz Grzebyk, Fabrication and characterization of a miniaturized octupole deflection system for the MEMS electron microscope. Ultramicroscopy. 2021, vol. 225, art. 113288, s. 1-8. ISSN: 0304-3991; 1879-2723 Resources:DOISFX
8	Article 2021 Karolina Laszczyk, Michał Krysztof, Electron beam source for the miniaturized electron microscope on-chip. Vacuum. 2021, vol. 189, art. 110236, s. 1-9. ISSN: 0042-207X Resources:DOISFX
9	Article 2020 Michał Krysztof, Tomasz Grzebyk, Preliminary research on imaging in MEMS electron microscope. Measurement Science & Technology. 2020, vol. 31, nr 3, art. 035401, s. 1-7. ISSN: 0957-0233; 1361-6501 Resources:DOISFX
10	Meeting abstract 2019 Karolina Laszczyk, Michał Krysztof, Anna Herman, Field emission CNT electron source in a triode configuration for the purpose of the MEMS transmission electron microscope. W: 13th Conference „Electron Technology” ELTE ; 43rd International Microelectronics and Packaging IMAPS Poland Conference, 4-6 September 2019, Wrocław, Poland : technical digest / Eds. Rafał Walczak, Karol Malecha. [B.m.] : International Microelectronics and Packaging Society Poland Chapter, [2019]. s. 1-2. ISBN: 978-83-932464-3-4