E-mail: michal.krysztof@pwr.edu.pl

Unit: Faculty of Electronics, Photonics and Microsystems (N) » Department of Microsystems

ul. Długa 61-65, 53-633 Wrocław
building M-6, room 36
phone +48 71 320 4974

Office hours

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Research fields

• Silicon and glass microengineering; MEMS and MOEMS; High Vacuum MEMS; electron microscopy.

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Recent papers

2018

• Krysztof M., Grzebyk T.P., Szyszka P., Laszczyk K., Górecka-Drzazga A., Dziuban J., Technology and parameters of thin membrane-anode for MEMS transmission electron microscope, Journal of Vacuum Science and Technology B, Nanotechnology & Microelectronics, 2018, vol. 36, nr 2, art. 02C107, s. 1-6.
• Słówko W., Wiatrowski A., Krysztof M., Detection of secondary and backscattered electrons for 3D imaging with multi-detector method in VP/ESEM, Micron, 2018, vol. 104, s. 45-60.

2015

• Krysztof M., Grzebyk T.P., Górecka-Drzazga A., Dziuban J., Zintegrowany, miniaturowy, transmisyjny mikroskop elektronowy, patent, P 413122 z dn. 14.07.2015. Opubl. 28.04.2017.
• Krysztof M., Grzebyk T.P., Górecka-Drzazga A., Dziuban J., Electron beam forming in MEMS-type electron gun, 28th International Vacuum Nanoelectronics Conference, IVNC 2015: technical digest, July 13-17, 2015, Guangzhou, China, s. 194-195.
• Krysztof M., Dziuban J., Górecka-Drzazga A., Grzebyk T.P., MEMS-type microchips for biological samples investigation in electron microscopy, Microscopy Conference, MC 2015, Göttingen, Germany, September 6-11, 2015, s. 342-344.

Papers in DONA database

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Selected publications
1	Proceeding paper 2024 Paweł Urbański, High performance paper-CNT field emitters. W: 2024 37th International Vacuum Nanoelectronics Conference (IVNC) : Technical Digest : Brno, Czech Republic, 15-19 July, 2024. Danvers, MA : IEEE, cop. 2024. s. 1-2. ISBN: 979-8-3503-7976-1; 979-8-3503-7977-8 Resources:DOIURL
2	Proceeding paper 2024 Paweł Urbański, MEMS-based vacuum analytical instruments for space exploration. W: 2024 37th International Vacuum Nanoelectronics Conference (IVNC) : Technical Digest : Brno, Czech Republic, 15-19 July, 2024. Danvers, MA : IEEE, cop. 2024. s. 1-2. ISBN: 979-8-3503-7976-1; 979-8-3503-7977-8 Resources:DOIURL
3	Article 2024 Paweł Urbański, Optimization of the transmission X-ray target towards obtaining monochromatic radiation. Advanced Optical Materials. 2024, vol. 12, nr 32, art. 2401534, s. 1-7. ISSN: 2195-1071 Resources:DOISFX
4	Patent 2024 Michał Krysztof, Wojciech Kubicki, Tomasz P. Grzebyk Patent. Polska, nr PL 245205, opubl. 03.06.2024. Zgłosz. nr 438521 z 19.07.2021. Miniaturowe urządzenie do żelowej elektroforezy kapilarnej z miniaturową wyrzutnią elektronową / Politechnika Wrocławska, Wrocław, PL ; Michał Krysztof, Wojciech Kubicki, Tomasz Grzebyk. 9 s. Resources:URL
5	Article 2024 Paweł Miera, Paweł Urbański, Matthias Hausladen, Rupert Schreiner, Integrated silicon electron source for high vacuum microelectromechanical system devices. Journal of Vacuum Science and Technology. B, Nanotechnology & Microelectronics. 2024, vol. 42, nr 2, art. 023001, s. 1-9. ISSN: 2166-2746; 2166-2754 Resources:DOISFX
6	Article 2023 Paweł Urbański, Transmission target for a MEMS X-ray source. Journal of Microelectromechanical Systems. 2023, vol. 32, nr 4, s. 398-404. ISSN: 1057-7157; 1941-0158 Resources:DOISFX
7	Proceeding paper 2023 Imaging using MEMS electron microscope. W: 36th International Vacuum Nanoelectronics Conference, IVNC : July 10-13, 2023, Cambridge MA, USA. Danvers, MA : IEEE, cop. 2023. s. 32-34. ISBN: 979-8-3503-0143-4 Resources:DOIURL
8	Proceeding paper 2023 Paweł Miera, Paweł Urbański, Integrated silicon electron source for High Vacuum Mems devices. W: 36th International Vacuum Nanoelectronics Conference, IVNC : July 10-13, 2023, Cambridge MA, USA. Danvers, MA : IEEE, cop. 2023. s. 210-212. ISBN: 979-8-3503-0143-4 Resources:DOIURL
9	Article 2023 Signal detection and imaging methods for MEMS electron microscope. Ultramicroscopy. 2023, vol. 244, art. 113653, s. 1-10. ISSN: 0304-3991; 1879-2723 Resources:DOIURLSFX
10	Proceeding paper 2022 Paweł Urbański, Mems X-ray source: electron-radiation conversion. W: 2022 21st International Conference on Micro and Nanotechnology for Power Generation and Energy Conversion Applications (PowerMEMS), 12-15 December 2022, Utah, Salt Lake City, USA. [B.m.] : IEEE, 2022. s. 42-45. ISBN: 978-1-6654-9307-9; 978-1-6654-9306-2 Resources:DOIURL

All publications